Submicron stereolithography for the production of freely movable mechanisms by using single-photon polymerization

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Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication

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Surface micromachining for microelectromechanical systems

J.M. Bustillo, Roger T. Howe, R.S. Muller · Proceedings of the IEEE · 1998 · 639 citations

Engineering, Materials Engineering, Materials Science +17

Laser Rapid Prototyping of Photonic Band-Gap Microstructures

Michael C. Wanke, O. Lehmann, Kurt Müller et al. · Science · 1997 · 255 citations

Engineering, Materials Engineering, Materials Science +17