Stress Compensation
Stress Compensation is a methodological approach in thin film engineering that systematically counteracts intrinsic stress within deposited films by introducing opposing strain mechanisms to achieve structural stability and prevent delamination or deformation.
109
Publications
3.8K
Citations
508
Authors
141
Institutions
Publications per year
2017–2026
30
Parents
109
1–5 of 109
508
3
h-index
3
h-index
Massachusetts Institute of Technology, United States
3 publications · 67 citations
3
h-index
3
h-index
Massachusetts Institute of Technology, United States
3 publications · 67 citations
3
h-index
1–5 of 508
141

Centre National de la Recherche Scientifique
Paris, France
5 h-index
16 publications
467 citations
Institut Fresnel
Marseille, France
4 h-index
12 publications
223 citations
Duke University
Durham, United States
4 h-index
5 publications
214 citations
Centrale Marseille
Marseille, France
4 h-index
12 publications
223 citations

Tohoku University
Sendai, Japan
3 h-index
12 publications
230 citations
Massachusetts Institute of Technology
Cambridge, United States
3 h-index
6 publications
127 citations
Tsinghua University
Beijing, China
3 h-index
15 publications
354 citations
China University of Mining and Technology
Xuzhou, China
3 h-index
17 publications
664 citations
1–8 of 141
6 publications · 290 citations
6
h-index
5 publications · 121 citations
5
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5 publications · 142 citations
5
h-index
4 publications · 96 citations
4
h-index
AO · 4 publications · 68 citations
4
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1–5