Stress Compensation

Stress Compensation is a methodological approach in thin film engineering that systematically counteracts intrinsic stress within deposited films by introducing opposing strain mechanisms to achieve structural stability and prevent delamination or deformation.

109

Publications

3.8K

Citations

508

Authors

141

Institutions

Publications per year

2017–2026

30

Authors

508

  1. YY
    Youwei Yao

    Tsinghua University, China

    3 publications · 67 citations

    3

    h-index

  2. JH
    John H. L. Hansen

    The University of Texas at Dallas, United States

    3 publications · 161 citations

    3

    h-index

  3. ML
    Mark L. Schattenburg

    Massachusetts Institute of Technology, United States

    3 publications · 67 citations

    3

    h-index

  4. TB
    Thomas Bégou

    Centre National de la Recherche Scientifique, France

    3 publications · 59 citations

    3

    h-index

  5. BD
    Brandon D. Chalifoux

    Massachusetts Institute of Technology, United States

    3 publications · 67 citations

    3

    h-index

1–5 of 508

Venues

  1. Journal of Microelectromechanical Systems

    6 publications · 290 citations

    6

    h-index

  2. Journal of Applied Physics

    5 publications · 121 citations

    5

    h-index

  3. Optics Express

    5 publications · 142 citations

    5

    h-index

  4. 4

    h-index

  5. Applied Optics

    AO · 4 publications · 68 citations

    4

    h-index

1–5