Concepedia

Process Drift Monitoring

Process Drift Monitoring is a method within the field of process robustness that systematically detects and analyzes deviations in process behavior over time by continuously observing process performance metrics to identify statistically significant changes indicative of underlying shifts in process execution or environmental conditions.

36

Publications

1.5K

Citations

93

Authors

45

Institutions

Publications per year

2017–2026

11

Parents

Publications

36

Process Monitoring Approach Using Fast Moving Window PCA

Xun Wang, Uwe Krüger, G.W. Irwin · Industrial & Engineering Chemistry Research · 2005 · 321 citations · Full text

, , +17

Supervisory run-to-run control of polysilicon gate etch using in situ ellipsometry

Stephanie Watts Butler, Jerry A. Stefani · IEEE Transactions on Semiconductor Manufacturing · 1994 · 226 citations

, , +14

An Evaluation of a GLR Control Chart for Monitoring the Process Mean

Marion R. Reynolds, Jianying Lou · Journal of Quality Technology · 2010 · 118 citations

, , +16

Detecting process mean shift in the presence of autocorrelation: a neural-network based monitoring scheme

H. Brian Hwarng · International Journal of Production Research · 2004 · 64 citations

, , +16

Application of exponentially weighted principal component analysis for the monitoring of a polymer film manufacturing process

Stephanie Lane, E.B. Martin, A.J. Morris et al. · Transactions of the Institute of Measurement and Control · 2003 · 55 citations

, , +17

1–5 of 36

Authors

93

  1. MR
    Marion R. Reynolds

    Virginia Tech, United States

    3 publications · 171 citations

    3

    h-index

  2. KB
    Kevin Burke

    University of Limerick, Ireland

    2 publications · 23 citations

    2

    h-index

  3. KK
    Kashaf Khan

    University of Limerick, Ireland

    2 publications · 23 citations

    2

    h-index

  4. CA
    Cesare Alippi

    Politecnico di Milano, Italy

    2 publications · 49 citations

    2

    h-index

  5. MD
    Mark Donnelly

    University of Ulster, United Kingdom

    2 publications · 23 citations

    2

    h-index

1–5 of 93

Institutions

45

  1. Virginia Tech

    Blacksburg, United States

    3 h-index

    6 publications

    315 citations

  2. University of Ulster

    Coleraine, United Kingdom

    2 h-index

    6 publications

    69 citations

  3. Georgia Institute of Technology

    Atlanta, United States

    2 h-index

    2 publications

    79 citations

  4. Queensland University of Technology

    Brisbane, Australia

    2 h-index

    4 publications

    82 citations

  5. University of Limerick

    Limerick, Ireland

    2 h-index

    2 publications

    23 citations

  6. Rutgers Sexual and Reproductive Health and Rights

    Utrecht, Netherlands

    2 h-index

    4 publications

    118 citations

  7. Politecnico di Milano

    Milan, Italy

    2 h-index

    6 publications

    147 citations

  8. Shahed University

    Tehran, Iran

    2 h-index

    3 publications

    45 citations

1–8 of 45

Venues

  1. 3

    h-index

  2. Journal of Quality Technology

    1 publications · 118 citations

    1

    h-index

  3. Journal of Applied Statistics

    1 publications · 15 citations

    1

    h-index

  4. International Journal of Production Research

    1 publications · 64 citations

    1

    h-index

  5. Scientia Iranica

    1 publications · 16 citations

    1

    h-index

1–5