Concepedia

Multilayer Soft Lithography

Multilayer Soft Lithography is a soft lithography technique that integrates multiple elastomeric layers to enable the precise spatial and temporal control of microfluidic processes through the stacked alignment of patterned features.

60

Publications

8.5K

Citations

225

Authors

68

Institutions

Publications per year

2017–2026

10

Parents

Publications

60

Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography

Marc Unger, Hou-Pu Chou, Todd Thorsen et al. · Science · 2000 · 4K citations

, , +17

Microfluidic Device for Single-Cell Analysis

Aaron R. Wheeler, William Throndset, Rebecca J. Whelan et al. · Analytical Chemistry · 2003 · 601 citations

, , +17

An Integrated Microfabricated Cell Sorter

Anne Y. Fu, Hou-Pu Chou, Charles Spence et al. · Analytical Chemistry · 2002 · 515 citations

, , +17

Scaling properties of a low-actuation pressure microfluidic valve

Vincent Studer, Giao Hang, Anna Pandolfi et al. · Journal of Applied Physics · 2003 · 276 citations

, , +17

Soft x-ray reduction lithography using multilayer mirrors

Hiroo Kinoshita, K. Kurihara, Yui Ishii et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 269 citations

, , +17

1–5 of 60

Authors

225

  1. CL
    Carl L. Hansen

    University of British Columbia, Canada

    4 publications · 123 citations

    4

    h-index

  2. SR
    Stephen R. Quake

    Stanford University, United States

    4 publications · 4.8K citations

    4

    h-index

  3. TH
    Tsung-Yi Ho

    National Tsing Hua University, Taiwan

    4 publications · 93 citations

    4

    h-index

  4. US
    Ulf Schlichtmann

    Technical University of Munich, Germany

    3 publications · 71 citations

    3

    h-index

  5. BL
    Bing Li

    Technical University of Munich, Germany

    3 publications · 71 citations

    3

    h-index

1–5 of 225

Institutions

68

  1. Harvard University

    Cambridge, United States

    5 h-index

    22 publications

    1.5K citations

  2. University of Michigan

    Ann Arbor, United States

    5 h-index

    15 publications

    1.1K citations

  3. California Institute of Technology

    Pasadena, United States

    5 h-index

    21 publications

    24.1K citations

  4. Centre National de la Recherche Scientifique

    Paris, France

    4 h-index

    14 publications

    930 citations

  5. National Tsing Hua University

    Hsinchu, Taiwan

    4 h-index

    4 publications

    93 citations

  6. University of British Columbia

    Vancouver, Canada

    4 h-index

    14 publications

    421 citations

  7. Hanyang University

    Seoul, South Korea

    3 h-index

    7 publications

    115 citations

  8. Fluidigm (United States)

    South San Francisco, United States

    3 h-index

    12 publications

    5.6K citations

1–8 of 68

Venues

  1. Lab on a Chip

    13 publications · 781 citations

    13

    h-index

  2. Analytical Chemistry

    6 publications · 1.3K citations

    6

    h-index

  3. Applied Physics Letters

    5 publications · 444 citations

    5

    h-index

  4. Journal of Micromechanics and Microengineering

    JMM · 5 publications · 184 citations

    5

    h-index

  5. Journal of Applied Physics

    3 publications · 360 citations

    3

    h-index

1–5