Molecular Contamination Control

Molecular Contamination Control is a systematic methodology within cleanroom processing that identifies, mitigates, and regulates the presence of contaminant molecules at the molecular level to prevent adverse effects on sensitive manufacturing processes, distinguishing it from particulate contamination control by targeting non-particulate, chemically active agents.

22

Publications

587

Citations

114

Authors

44

Institutions

Publications per year

2017–2026

5

Authors

114

  1. AG
    Anatoly Grayfer

    Entegris (United States), United States

    2 publications · 20 citations

    2

    h-index

  2. OP
    Oleg P. Kishkovich

    Information Extraction & Transport (United States), United States

    2 publications · 20 citations

    2

    h-index

  3. SH
    Shih-Cheng Hu

    National Taipei University of Technology, Taiwan

    2 publications · 57 citations

    2

    h-index

  4. AV
    A. van de Runstraat

    Eindhoven University of Technology, Netherlands

    1 publications · 35 citations

    1

    h-index

  5. BP
    B. Pelissier

    Centre National de la Recherche Scientifique, France

    1 publications · 33 citations

    1

    h-index

1–5 of 114