Oleg P. Kishkovich

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Active since

2001

Affiliations

Information Extraction & Transport (United States)(Current)

Oleg P. Kishkovich is an author at Information Extraction & Transport (United States) specializing in materials science, molecular contamination control, and haze correction.

Publications per year

2001–2007

Publications

Prevention of optics and resist contamination in 300-mm lithography: improvements in chemical air filtration

Devon A. Kinkead, Anatoly Grayfer, Oleg P. Kishkovich · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 10 citations

Engineering, Materials Engineering, Materials Science +10

Contrarian approach to and ultimate solution for 193-nm reticle haze

Oleg P. Kishkovich, Anatoly Grayfer, Frank V. Belanger · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 10 citations

Natural Sciences, Chemistry, Materials Science +13

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