Concepedia

Metrology Data Analysis

Metrology Data Analysis is a systematic method within the field of microfabrication metrology that quantitatively interprets dimensional, material, and process-related measurements to assess precision, accuracy, and variability, thereby enabling the validation and optimization of nanoscale fabrication processes.

101

Publications

4.9K

Citations

386

Authors

156

Institutions

Publications per year

2017–2026

27

Parents

Publications

101

M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures

P.M. Osterberg, S.D. Senturia · Journal of Microelectromechanical Systems · 1997 · 764 citations

, , +17

The 2007 International Vocabulary of Metrology (VIM), JCGM 200:2008 [ISO/IEC Guide 99]: Meeting the need for intercontinentally understood concepts and their associated intercontinentally agreed terms

Paul De Bièvre · Clinical Biochemistry · 2009 · 531 citations

, , +12

A critical examination of the fundamental relations used in the analysis of nanoindentation data

Jack C. Hay, Alexei Bolshakov, George M. Pharr · Journal of materials research/Pratt's guide to venture capital sources · 1999 · 441 citations

, , +16

Characterization and metrology for ULSI technology

David G. Seiler · Characterization and Metrology for ULSI Technology · 2006 · 350 citations

, , +12

Productive Metrology - Adding Value to Manufacture

H. Kunzmann, Tilo Pfeifer, Robert Schmitt et al. · CIRP Annals · 2005 · 130 citations

, , +12

1–5 of 101

Authors

386

  1. SM
    Seán McLoone

    Queen's University Belfast, United Kingdom

    4 publications · 112 citations

    4

    h-index

  2. PK
    Petr Klapetek

    Český metrologický institut, Czechia

    3 publications · 83 citations

    3

    h-index

  3. FC
    Fan‐Tien Cheng

    National Cheng Kung University, Taiwan

    3 publications · 72 citations

    3

    h-index

  4. PD
    Paul De Bièvre

    European Commission, Belgium

    3 publications · 608 citations

    3

    h-index

  5. SG
    Simon G. Alcock

    Diamond Light Source, United Kingdom

    3 publications · 64 citations

    3

    h-index

1–5 of 386

Institutions

156

  1. ASML (Netherlands)

    Veldhoven, The Netherlands

    5 h-index

    29 publications

    615 citations

  2. University of Padua

    Padua, Italy

    5 h-index

    8 publications

    328 citations

  3. Český metrologický institut

    Brno, Czechia

    4 h-index

    6 publications

    161 citations

  4. National Physical Laboratory

    London, United Kingdom

    4 h-index

    10 publications

    249 citations

  5. Physikalisch-Technische Bundesanstalt

    Braunschweig, Germany

    4 h-index

    8 publications

    388 citations

  6. STMicroelectronics (France)

    Montrouge, France

    4 h-index

    17 publications

    233 citations

  7. National Cheng Kung University

    Tainan City, Taiwan

    4 h-index

    11 publications

    261 citations

  8. National Institute of Standards and Technology

    Gaithersburg, United States

    4 h-index

    8 publications

    193 citations

1–8 of 156

Venues

  1. 9

    h-index

  2. MM Science Journal

    4 publications · 133 citations

    4

    h-index

  3. Accreditation and Quality Assurance

    3 publications · 87 citations

    3

    h-index

  4. Metrologia

    3 publications · 115 citations

    3

    h-index

  5. CIRP Annals

    3 publications · 240 citations

    3

    h-index

1–5