Concepedia

Interferometric Surface Measurement

Interferometric Surface Measurement is a non-contact optical metrology technique that uses the interference of coherent light waves to precisely quantify surface topography by detecting phase differences between reference and specimen beams.

495

Publications

17.4K

Citations

1.2K

Authors

339

Institutions

Publications per year

2017–2026

64

Variants

Interferometric Surface Metrology

Parents

Publications

495

Interferometric displacement measurement on scattering surfaces utilizing speckle effect

JA Leendertz · Journal of Physics E Scientific Instruments · 1970 · 477 citations

, , +15

Two-wavelength phase shifting interferometry

Yeou-Yen Cheng, James C. Wyant · Applied Optics · 1984 · 432 citations

, , +16

Multiple-wavelength phase-shifting interferometry

Yeou-Yen Cheng, James C. Wyant · Applied Optics · 1985 · 309 citations

, , +15

Improved vertical-scanning interferometry

Akiko Harasaki, Joanna Schmit, James C. Wyant · Applied Optics · 2000 · 275 citations · Full text

, , +14

Step height measurement using two-wavelength phase-shifting interferometry

Katherine Creath · Applied Optics · 1987 · 260 citations

, , +16

1–5 of 495

Authors

1.2K

  1. JC
    James C. Wyant

    University of Arizona, United States

    15 publications · 1.6K citations

    14

    h-index

  2. JH
    James H. Burge

    University of Arizona, United States

    14 publications · 408 citations

    13

    h-index

  3. PJ
    Peter J. de Groot

    Zygo (United States), United States

    12 publications · 385 citations

    12

    h-index

  4. WO
    Wolfgang Osten

    University of Stuttgart, Germany

    12 publications · 416 citations

    11

    h-index

  5. RL
    Richard Leach

    University of Nottingham, United Kingdom

    9 publications · 419 citations

    9

    h-index

1–5 of 1.2K

Institutions

339

  1. University of Arizona

    Tucson, United States

    25 h-index

    98 publications

    5.3K citations

  2. Zygo (United States)

    Middlefield, United States

    15 h-index

    28 publications

    1K citations

  3. University of Stuttgart

    Stuttgart, Germany

    12 h-index

    42 publications

    1.5K citations

  4. National Physical Laboratory

    London, United Kingdom

    11 h-index

    19 publications

    743 citations

  5. Chinese Academy of Sciences

    Beijing, China

    10 h-index

    35 publications

    993 citations

  6. Niigata University

    Niigata, Japan

    10 h-index

    24 publications

    1K citations

  7. Loughborough University

    Loughborough, United Kingdom

    9 h-index

    15 publications

    842 citations

  8. Commonwealth Scientific and Industrial Research Organisation

    Canberra, Australia

    9 h-index

    20 publications

    471 citations

1–8 of 339

Venues

  1. Applied Optics

    84 publications · 4.8K citations

    40

    h-index

  2. 24

    h-index

  3. Optics Letters

    25 publications · 940 citations

    19

    h-index

  4. Optical Engineering

    38 publications · 1.1K citations

    19

    h-index

  5. Optics Express

    31 publications · 878 citations

    19

    h-index

1–5