Defect Mitigation

Defect Mitigation is a scholarly contribution in the field of mask design that constitutes a method, model, framework, or analogous artifact specifically devised to reduce, manage, or eliminate flaws in mask functionality, fidelity, or performance during fabrication or application.

63

Publications

2.4K

Citations

309

Authors

102

Institutions

Publications per year

2017–2026

22

Authors

309

  1. MD
    Martin D. F. Wong

    University of Illinois Urbana-Champaign, United States

    4 publications · 63 citations

    4

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  2. HZ
    Hongbo Zhang

    University of Illinois Urbana-Champaign, United States

    4 publications · 63 citations

    4

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  3. YD
    Yuelin Du

    University of Illinois Urbana-Champaign, United States

    4 publications · 63 citations

    4

    h-index

  4. EG
    Emily Gallagher

    IMEC, Belgium

    3 publications · 38 citations

    3

    h-index

  5. PY
    Pei-yang Yan

    Intel (United States), United States

    3 publications · 80 citations

    3

    h-index

1–5 of 309

Venues

  1. 13

    h-index

  2. 2

    h-index

  3. Langmuir

    1 publications · 33 citations

    1

    h-index

  4. Small

    1 publications · 20 citations

    1

    h-index

  5. Computers in Industry

    1 publications · 176 citations

    1

    h-index

1–5