Critical Dimension Control

Critical Dimension Control is a metrological framework in thin film lithography that specifies the precise regulation and measurement of feature sizes at the nanoscale to ensure fidelity between design intent and fabricated patterns.

377

Publications

11.8K

Citations

1.8K

Authors

299

Institutions

Publications per year

2017–2026

Parents

Thin Film Lithography

Publications

377

Memristor crossbar arrays with 6-nm half-pitch and 2-nm critical dimension

Shuang Pi, Can Li, Hao Jiang et al. · Nature Nanotechnology · 2018 · 526 citations

Engineering, Electrical Engineering, Materials Science +14

Toward Improving the Relevance of Information Systems Research to Practice: The Role of Applicability Checks1

Michael Rosemann, Iris Vessey · MIS Quarterly · 2008 · 469 citations

Business, Information Systems, Information Systems Development +5

The neoliberalisation of strategic spatial planning

Kristian Olesen · Planning Theory · 2013 · 169 citations

Planning, Regional Planning, Spatial Planning +12

Fabrication of Microdevices with Integrated Nanowires for Investigating Low-Dimensional Phonon Transport

Kedar Hippalgaonkar, Baoling Huang, Renkun Chen et al. · Nano Letters · 2010 · 161 citations

Engineering, Materials Engineering, Materials Science +17

The Limits of Lamellae-Forming PS-<i>b</i>-PMMA Block Copolymers for Lithography

Lei Wan, Ricardo Ruiz, He Gao et al. · ACS Nano · 2015 · 154 citations

Engineering, Materials Engineering, Materials Science +17

1–5 of 377

Authors

1.8K

CJ
Costas J. Spanos
University of California, Berkeley, United States
8 publications · 196 citations
8
h-index
EP
E. Pargon
Centre National de la Recherche Scientifique, France
6 publications · 191 citations
6
h-index
OJ
O. Joubert
Centre National de la Recherche Scientifique, France
6 publications · 169 citations
6
h-index
CG
C. Grant Willson
The University of Texas at Austin, United States
5 publications · 158 citations
5
h-index
SB
S. Barnola
Laboratoire d'Électronique des Technologies de l'Information, France
5 publications · 124 citations
5
h-index

1–5 of 1.8K

Institutions

299

1–8 of 299

Venues

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
120 publications · 2.4K citations
24
h-index
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
55 publications · 1.4K citations
22
h-index
Journal of Micro/Nanolithography MEMS and MOEMS
22 publications · 595 citations
16
h-index
Japanese Journal of Applied Physics
JJAP · 21 publications · 435 citations
13
h-index
IEEE Transactions on Semiconductor Manufacturing
15 publications · 354 citations
13
h-index

1–5