Concepedia

Back-end Of Line Processing

Back-End of Line Processing is a stage in integrated circuit fabrication that encompasses the processes of forming interconnects, vias, and dielectric layers to electrically connect transistors and other devices, distinguishing it from the Front-End of Line processes focused on device fabrication.

22

Publications

1.5K

Citations

143

Authors

48

Institutions

Publications per year

2017–2026

5

Variants

BeolBeol Processing

Parents

Publications

22

Bipolar and Unipolar Resistive Switching in Cu-Doped $ \hbox{SiO}_{2}$

Christina Schindler, Sarath Chandran Puthen Thermadam, Rainer Waser et al. · IEEE Transactions on Electron Devices · 2007 · 379 citations

, , +17

A Low-Power Nonvolatile Switching Element Based on Copper-Tungsten Oxide Solid Electrolyte

Michael N. Kozicki, C. Gopalan, M. Balakrishnan et al. · IEEE Transactions on Nanotechnology · 2006 · 217 citations

, , +17

General low-temperature growth of two-dimensional nanosheets from layered and nonlayered materials

Biao Qin, Muhammad Zeeshan Saeed, Qiuqiu Li et al. · Nature Communications · 2023 · 128 citations · Full text

, , +17

Programmable metallization cell memory based on Ag-Ge-S and Cu-Ge-S solid electrolytes

Michael N. Kozicki, M. Balakrishnan, C. Gopalan et al. · 2006 · 98 citations

, , +17

Wafer‐Scale Synthesis of Graphene on Sapphire: Toward Fab‐Compatible Graphene

Neeraj Mishra, Stiven Forti, Filippo Fabbri et al. · Small · 2019 · 98 citations · Full text

, , +17

1–5 of 22

Authors

143

  1. MN
    Michael N. Kozicki

    Arizona State University, United States

    3 publications · 694 citations

    3

    h-index

  2. MB
    M. Balakrishnan

    Arizona State University, United States

    2 publications · 315 citations

    2

    h-index

  3. CG
    C. Gopalan

    Arizona State University, United States

    2 publications · 315 citations

    2

    h-index

  4. MM
    M. Mitkova

    Arizona State University, United States

    2 publications · 315 citations

    2

    h-index

  5. YF
    Ya Feng

    The University of Tokyo, Japan

    2 publications · 154 citations

    2

    h-index

1–5 of 143

Institutions

48

  1. Stanford University

    Stanford, United States

    3 h-index

    9 publications

    421 citations

  2. Arizona State University

    Tempe, United States

    3 h-index

    10 publications

    1.9K citations

  3. Lam Research (United States)

    Fremont, United States

    2 h-index

    3 publications

    104 citations

  4. Hunan University

    Changsha, China

    2 h-index

    32 publications

    2.5K citations

  5. University of California, Berkeley

    Berkeley, United States

    2 h-index

    6 publications

    95 citations

  6. National Tsing Hua University

    Hsinchu, Taiwan

    2 h-index

    7 publications

    111 citations

  7. North Carolina State University

    Raleigh, United States

    1 h-index

    7 publications

    147 citations

  8. National Enterprise for NanoScience and NanoTechnology

    Pisa, Italy

    1 h-index

    2 publications

    196 citations

1–8 of 48

Venues

  1. IEEE Transactions on Electron Devices

    3 publications · 436 citations

    3

    h-index

  2. 2

    h-index

  3. Microelectronic Engineering

    2 publications · 62 citations

    2

    h-index

  4. Small

    2 publications · 124 citations

    2

    h-index

  5. IEEE Transactions on Nanotechnology

    1 publications · 217 citations

    1

    h-index

1–5