3
Publications
70
Citations
3
H-Index
2004
Active since
Affiliations
M. Chae is an author at IBM (United States) specializing in applied physics, electrical engineering, and engineering.
Top concepts
EngineeringApplied PhysicsMicroelectronicsElectrical EngineeringVlsi DesignNanoelectronicsComputer EngineeringLow-power ElectronicsNoiseCmos Technology
Publications per year
2004–2012
3
3
A 45 nm CMOS node Cu/Low-k/ Ultra Low-k PECVD SiCOH (k=2.4) BEOL Technology
S. Sankaran, S. Arai, R. Augur et al. · 2006 · 22 citations
Materials Science, Materials Engineering, Electrical Engineering +15
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