Yasushi Ishikawa

Malliavin calculus on the Wiener–Poisson space and its application to canonical SDE with jumps

Yasushi Ishikawa, Hiroshi Kunita · Stochastic Processes and their Applications · 2006 · 92 citations

Spectral Theory, Wiener–poisson Space, Engineering +13

On-Wafer Monitoring of Vacuum-Ultraviolet Radiation Damage in High-Density Plasma Processes

Seiji Samukawa, Yasushi Ishikawa, Shinya Kumagai et al. · Japanese Journal of Applied Physics · 2001 · 57 citations

Sio 2, Electron Density, Electrical Engineering +12

Surface reactions during etching of organic low-k films by plasmas of N2 and H2

Kenji Ishikawa, Yoshikazu Yamaoka, Moritaka Nakamura et al. · Journal of Applied Physics · 2006 · 44 citations

Chemical Engineering, H2 Plasmas, Engineering +13

Reduction of ultraviolet-radiation damage in SiO2 using pulse-time-modulated plasma and its application to charge coupled 44 device image sensor processes

Mitsuru Okigawa, Yasushi Ishikawa, Seiji Samukawa · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 42 citations

Filter Device, Engineering, Plasma Processing +20

Ultraviolet-induced damage in fluorocarbon plasma and its reduction by pulse-time-modulated plasma in charge coupled device image sensor wafer processes

Mitsuru Okigawa, Yasushi Ishikawa, Yoshinari Ichihashi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 39 citations

Ultraviolet Light, Engineering, Uv Absorption +20