Tadao Kato

Cold and Low-Energy Ion Etching (COLLIE)

Nobuo Fujiwara, Teruo Shibano, Kyusaku Nishioka et al. · Japanese Journal of Applied Physics · 1989 · 35 citations

Engineering, Electrical Engineering, Physics +15

Dielectric breakdown of silicon oxide studied by scanning probe microscopy

Takao Yasue, Yoshiko Yoshida, Hiroshi Koyama et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 26 citations

Engineering, Electrical Engineering, Materials Science +17

Unique resist profiles with Be and Si focused ion beam lithography

Hiroaki Morimoto, Hiroshi Onoda, Takaaki Kato et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 21 citations

Engineering, Electrical Engineering, Materials Science +13

Characterization of Silicon Implanted with Focused Ion Beam by Raman Microprobe

Kohji Mizoguchi, Shin-ichi Nakashima, Akihito Fujii et al. · Japanese Journal of Applied Physics · 1987 · 18 citations

Engineering, Materials Engineering, Materials Science +16

I–V characteristics of modified silicon surface using scanning probe microscopy

Takao Yasue, Hiroshi Koyama, Tadao Kato et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 13 citations

Engineering, Materials Engineering, Materials Science +17