Concepedia

Kyusaku Nishioka

KN

Statistics

Publications

4

Citations

86

H-Index

4

Active since

1976

Affiliations

Mitsubishi Electric (Japan)(Current)

Mitsubishi Electric (Germany)

Kyusaku Nishioka is an author at Mitsubishi Electric (Japan) specializing in etching processes, engineering, and plasma etching.

Publications per year

1976–1991

4

Publications

4

Cold and Low-Energy Ion Etching (COLLIE)

Nobuo Fujiwara, Teruo Shibano, Kyusaku Nishioka et al. · Japanese Journal of Applied Physics · 1989 · 35 citations

Engineering, Electrical Engineering, Physics +15

Microfabrication of Anti-Reflective Chromium Mask by Gas Plasma

Haruhiko Abe, Kyusaku Nishioka, Setsuko Tamura et al. · Japanese Journal of Applied Physics · 1976 · 18 citations · Full text

Engineering, Materials Engineering, Materials Science +17

ECR Plasma Etching with Heavy Halogen Ions

Nobuo Fujiwara, Hisaharu Sawai, Masahiro Yoneda et al. · Japanese Journal of Applied Physics · 1990 · 17 citations

Engineering, Electrical Engineering, Materials Science +16

High Performance Electron Cyclotron Resonance Plasma Etching with Control of Magnetic Field Gradient

Nobuo Fujiwara, Hisaharu Sawai, Masahiro Yoneda et al. · Japanese Journal of Applied Physics · 1991 · 16 citations

Engineering, Electrical Engineering, Physics +13

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