Concepedia

Hisaharu Sawai

HS

Statistics

Publications

3

Citations

43

H-Index

3

Active since

1987

Affiliations

Osaka Prefecture University(Current)

Hisaharu Sawai is an author at Osaka Prefecture University specializing in microfabrication, etching processes, and dry etching.

Publications per year

1987–1991

3

Publications

3

ECR Plasma Etching with Heavy Halogen Ions

Nobuo Fujiwara, Hisaharu Sawai, Masahiro Yoneda et al. · Japanese Journal of Applied Physics · 1990 · 17 citations

, , +16

High Performance Electron Cyclotron Resonance Plasma Etching with Control of Magnetic Field Gradient

Nobuo Fujiwara, Hisaharu Sawai, Masahiro Yoneda et al. · Japanese Journal of Applied Physics · 1991 · 16 citations

, , +13

Effect of Composition Change on Superconducting Properties in a Y-Ba-Cu-O Compound System

Mineo Kogachi, Kiyotaka Nakahigashi, Shigemitsu Nakanishi et al. · Japanese Journal of Applied Physics · 1987 · 10 citations

, , +13

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