H. Sperlich - Concepedia

Author

H. Sperlich

Also Known As

Bähr, M., D. Landgraf, Decker, D., H SPERLICH, H. Sperlich, H.-P. Sperlich, Hans-Peter Sperlich, Hans‐Peter Sperlich, Heinze, B., Hofmann, M.

246

Publications

215

Citations

H-Index

Concepts

All Affiliations

H. Sperlich is an author at Roth and Rau (Germany) specializing in applied physics, surface science, and engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	4	4	110
2	Applied Physics	4	4	110
3	Electrical Engineering	3	3	98
4	Materials Engineering	3	3	71
5	Chemical Engineering	1	1	27

H. Sperlich

Publications

110

Citations

H-Index

Page 1

	Year	Citations
PECVD-AlOx/SiNx Passivation Stacks on Silicon: Effective Charge Dynamics and Interface Defect State Spectroscopy Jan Amaru Töfflinger, A. Laades, Caspar Leendertz, Energy Procedia Electrical EngineeringCrystalline SiliconEngineeringPecvd-alox/sinx Passivation StacksPhysics	2014	39
PECVD-AlOx/SiNx passivation stacks on wet chemically oxidized silicon: Constant voltage stress investigations of charge dynamics and interface defect states Jan Amaru Töfflinger, A. Laades, Lars Korte, Solar Energy Materials and Solar Cells Materials ScienceMaterials EngineeringElectrical EngineeringSemiconductor DeviceEngineering	2014	32
The influence of the SiN cap process on the electromigration and stressvoiding performance of dual damascene Cu interconnects A. von Glasow, A. Fischer, D. Bunel, Crystal StructureEngineeringChemical DepositionInterconnect (Integrated Circuits)Chemical Engineering	2003	27
On the impact of interfacial SiO<sub>x</sub>‐layer on the passivation properties of PECVD synthesized aluminum oxide A. Laades, H. Sperlich, M. Bähr, Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics EngineeringPhotovoltaicsAluminum OxideCharge Carrier LifetimeEpitaxial Growth	2012	12

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