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PECVD-AlOx/SiNx passivation stacks on wet chemically oxidized silicon: Constant voltage stress investigations of charge dynamics and interface defect states

Materials ScienceMaterials EngineeringElectrical EngineeringSemiconductor DeviceEngineeringPecvd-alox/sinx Passivation StacksOxidized SiliconSilicon DebuggingSurface ScienceApplied PhysicsSemiconductor Device FabricationElectronic PackagingSilicon On InsulatorMicroelectronicsCharge DynamicsElectrical Insulation