Meishoku Koh Meishoku Koh

Reduction of Fluctuation in Semiconductor Conductivity by One-by-One Ion Implantation of Dopant Atoms

Takahiro Shinada, Atsuki Ishikawa Atsuki Ishikawa, Chie Hinoshita et al. · Japanese Journal of Applied Physics · 2000 · 28 citations

Engineering, Semiconductor Materials, Integrated Circuits +19

High-Density Nanoetchpit-Array Fabrication on Si Surface Using Ultrathin SiO₂ Mask

Meishoku Koh Meishoku Koh, S. Sawara, Tomomi Goto et al. · Japanese Journal of Applied Physics · 2000 · 19 citations

Nanoetchpit Arrays, Engineering, High-density Nanoetchpit-array Fabrication +16

Novel Process for High-Density Buried Nanopyramid Array Fabrication by Means of Dopant Ion Implantation and Wet Etching

Meishoku Koh Meishoku Koh, Tomomi Goto, Atsushi Sugita Atsushi Sugita et al. · Japanese Journal of Applied Physics · 2001 · 18 citations

Engineering, Silicon On Insulator, Wet Etching +17

Single-Event Upset Test of Static Random Access Memory Using Single-Ion Microprobe

Takashi Matsukawa, Katsunori Noritake, Meishoku Koh Meishoku Koh et al. · Japanese Journal of Applied Physics · 1992 · 11 citations

Hardware Trojan, Non-volatile Memory, Engineering +16