Statistics
Publications
58
Citations
2.4K
H-Index
28
Active since
1973
A. Itoh is an author at Kyoto University specializing in engineering, applied physics, and materials science.
Publications per year
1973–2017
58
58
Reactive molecular beam epitaxy of aluminium nitride
S. Yoshida, S. Misawa, Youhei Fujii et al. · Journal of Vacuum Science and Technology · 1979 · 197 citations
Konosuke INAGAWA, Keiichiro Watanabe, H. Ohsone et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 127 citations · Full text
Materials Engineering, Materials Science, Chemical Engineering +14
Mechanism of rf reactive sputtering
Fujitoshi Shinoki, A. Itoh · Journal of Applied Physics · 1975 · 108 citations
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