Statistics
Publications
21
Citations
1K
H-Index
14
Active since
1983
Affiliations
NEC (Japan)(Current)
T. Horiuchi is an author at NEC (Japan) specializing in engineering, electrical engineering, and microelectronics.
Publications per year
1983–2003
21
21
Thin oxide charging current during plasma etching of aluminum
Hang‐Sik Shin, C.-C. King, T. Horiuchi et al. · IEEE Electron Device Letters · 1991 · 106 citations
1–5 of 21