Statistics
Publications
6
Citations
105
H-Index
6
Active since
1994
Affiliations
J.M. Luchies is an author at Philips (Netherlands) specializing in engineering, electrical engineering, and microelectronics.
Publications per year
1994–2003
6
6
Relation between product yield and plasma process induced damage
J.M. Luchies, P. Simon, F.G. Kuper et al. · 2002 · 17 citations
Electrical Engineering, Engineering, Process Dependent Parameter +10
Antenna ratio definition for VLSI circuits [plasma etch damage]
P. Simon, J.M. Luchies, W. Maly · 2003 · 14 citations
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