Statistics
Publications
6
Citations
105
H-Index
6
Active since
1994
Affiliations
J.M. Luchies is an author at Philips (Netherlands) specializing in microelectronics, device characterization, and engineering.
Publications per year
1994–2003
6
6
Relation between product yield and plasma process induced damage
J.M. Luchies, P. Simon, F.G. Kuper et al. · 2002 · 17 citations
1–5 of 6