Statistics
Publications
3
Citations
83
H-Index
3
Active since
1995
C. Dézauzier is an author at CEA Grenoble specializing in engineering, electronic materials, and device characterization.
Publications per year
1995–2010
3
3
3D-AFM enhancement for CD metrology dedicated to lithography sub-28-nm node requirements
J. Foucher, Narender Rana, C. Dézauzier · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 25 citations
Engineering, Electrical Engineering, Manufacturing Engineering +17
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