Concepedia

Shohei Shima

SS

Statistics

Publications

9

Citations

254

H-Index

9

Active since

1982

Affiliations

Ebara (Japan)(Current)

Toshiba (Japan)

Hanyang University

Kanazawa University

Shohei Shima is an author at Ebara (Japan) specializing in materials science, materials engineering, and natural sciences.

Publications per year

1982–2016

9

Publications

9

Investigation of cu-BTA complex formation during Cu chemical mechanical planarization process

Byoung-Jun Cho, Shohei Shima, Satomi Hamada et al. · Applied Surface Science · 2016 · 94 citations

, , +14

Visualizing Nanoscale Distribution of Corrosion Cells by Open-Loop Electric Potential Microscopy

Kyoko Honbo, Shoichiro Ogata, Takuya Kitagawa et al. · ACS Nano · 2016 · 44 citations · Full text

, , +17

Effects of Liner Metal and CMP Slurry Oxidizer on Copper Galvanic Corrosion

Shohei Shima, Akira Fukunaga, Manabu Tsujimura · ECS Transactions · 2007 · 30 citations

, , +17

Nanoscale corrosion behavior of polycrystalline copper fine wires in dilute NaCl solution investigated by in-situ atomic force microscopy

Shoichiro Ogata, Naritaka Kobayashi, Takuya Kitagawa et al. · Corrosion Science · 2016 · 20 citations · Full text

, , +16

Stress Corrosion Cracking of Cu Interconnects during CMP with a Cu/Porous Low-k Structure

Masako Kodera, Shin‐ichiro Uekusa, Hidekazu Nagano et al. · Journal of The Electrochemical Society · 2005 · 18 citations

, , +17

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