Masako Kodera

Stress Corrosion Cracking of Cu Interconnects during CMP with a Cu/Porous Low-k Structure

Masako Kodera, Shin‐ichiro Uekusa, Hidekazu Nagano et al. · Journal of The Electrochemical Society · 2005 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +17

Characterization technique for detection of atom-size crystalline defects and strains using two-dimensional fast-Fourier-transform sampling Moiré method

Masako Kodera, Qinghua Wang, Shien Ri et al. · Japanese Journal of Applied Physics · 2018 · 14 citations

Natural Sciences, Materials Science, Physics +17

Localized Oxidation of the Cu Surface after Chemical Mechanical Planarization Processing

Masako Kodera, Yukiko Nishioka, Shohei Shima et al. · Japanese Journal of Applied Physics · 2005 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +16

Evaluation of Dielectric Constant through Direct Chemical Mechanical Planarization of Porous Low-k Film

Masako Kodera, Takumi Takahashi, Gaku Mimamihaba · Japanese Journal of Applied Physics · 2010 · 11 citations

Natural Sciences, Materials Engineering, Materials Science +17

Nanoscale Stress Field Evaluation with Shallow Trench Isolation Structure Assessed by Cathodoluminescence Spectroscopy, Raman Spectroscopy, and Finite Element Method Analyses

Masako Kodera, Tadashi Iguchi, N. Tsuchiya et al. · Japanese Journal of Applied Physics · 2008 · 11 citations

Engineering, Materials Science, Physics +17