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Tadashi Iguchi

TI

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Publications

1

Citations

11

H-Index

1

Active since

2008

Affiliations

Horiba (Japan)(Current)

Tadashi Iguchi is an author at Horiba (Japan) specializing in nanoscale materials, engineering, and stress field mapping.

Publications per year

2008–2008

1

Publications

1

Nanoscale Stress Field Evaluation with Shallow Trench Isolation Structure Assessed by Cathodoluminescence Spectroscopy, Raman Spectroscopy, and Finite Element Method Analyses

Masako Kodera, Tadashi Iguchi, N. Tsuchiya et al. · Japanese Journal of Applied Physics · 2008 · 11 citations

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