Concepedia

P. Alluri

PA

9

Publications

344

Citations

9

H-Index

1994

Active since

Affiliations

Motorola (United States)(Current)

Pacific Northwest National Laboratory

Arizona State University

P. Alluri is an author at Motorola (United States) specializing in engineering, thin films, and applied physics.

Top concepts

EngineeringThin FilmsApplied PhysicsMaterial ScienceSurface ScienceElectrical EngineeringChemistryMicroelectronicsInorganic ChemistryMaterials Engineering

Publications per year

1994–2002

9

Publications

9

Optical properties of bulk and thin-film SrTiO3 on Si and Pt

Stefan Zollner, Alexander A. Demkov, R. Liu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 118 citations · Full text

Optical Materials, Engineering, Thin-film Srtio3 +17

Integration of thin film MIM capacitors and resistors into copper metallization based RF-CMOS and Bi-CMOS technologies

P. Zürcher, P. Alluri, Peir-Yung Chu et al. · 2002 · 62 citations

Materials Science, Electrical Engineering, Sheet Resistance +14

Interface characterization of high-quality SrTiO3 thin films on Si(100) substrates grown by molecular beam epitaxy

J. Ramdani, Ravi Droopad, Zhiyi Yu et al. · Applied Surface Science · 2000 · 36 citations

Materials Science, Engineering, Silicon On Insulator +6

PE-MOCVD of Dielectric Thin Films: Challenges and Opportunities

Sandwip K. Dey, P. Alluri · MRS Bulletin · 1996 · 31 citations

Engineering, Applied Physics, Semiconductor Material +4

Influence of surfaces on the dielectric properties and leakage currents in paraelectric (Pb<sub>0.72</sub>La<sub>0.28</sub>)TiO<sub>3</sub> thin films

Sandwip K. Dey, P. Alluri, Jong-Jan Lee et al. · Integrated ferroelectrics · 1995 · 26 citations

Engineering, Thin Film Process Technology, Charge Transport +19

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