Concepedia

O. J. Marsh

OJ

49

Publications

1.9K

Citations

27

H-Index

1963

Active since

Affiliations

HRL Laboratories (United States)(Current)

California Institute of Technology

O. J. Marsh is an author at HRL Laboratories (United States) specializing in applied physics, engineering, and crystalline defects.

Top concepts

EngineeringApplied PhysicsSemiconductorsMaterial ScienceElectrical EngineeringCrystalline DefectsPhysicsMicroelectronicsCondensed Matter PhysicsSurface Science

Publications per year

1963–2001

49

Publications

49

Electrical Behavior of Group III and V Implanted Dopants in Silicon

R. Baron, G. A. Shifrin, O. J. Marsh et al. · Journal of Applied Physics · 1969 · 155 citations

Column Iii, V Implanted Dopants, Engineering +17

Stability of cerium oxide on silicon studied by x-ray photoelectron spectroscopy

Edward Preisler, O. J. Marsh, Robin Beach et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 135 citations

Engineering, Integrated Circuits, Chemistry +16

ION IMPLANTATION OF SILICON: II. ELECTRICAL EVALUATION USING HALL-EFFECT MEASUREMENTS

J. W. Mayer, O. J. Marsh, G. A. Shifrin et al. · Canadian Journal of Physics · 1967 · 117 citations

Materials Science, Semiconductors, Electrical Engineering +15

Disorder produced in SiC by ion bombardment

R. R. Hart, H. L. Dunlap, O. J. Marsh · Radiation Effects · 1971 · 84 citations

Materials Engineering, Materials Science, Ion Implantation +14

Technique used in Hall effect analysis of ion implanted Si and Ge

Nils Gunnar Johansson, J. W. Mayer, O. J. Marsh · Solid-State Electronics · 1970 · 81 citations

Electrical Engineering, Ion Implantation, Engineering +5

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