Statistics
Publications
49
Citations
1.9K
H-Index
27
Active since
1963
Affiliations
O. J. Marsh is an author at HRL Laboratories (United States) specializing in materials science, semiconductor materials, and electronic materials.
Publications per year
1963–2001
49
49
Electrical Behavior of Group III and V Implanted Dopants in Silicon
R. Baron, G. A. Shifrin, O. J. Marsh et al. · Journal of Applied Physics · 1969 · 155 citations
Stability of cerium oxide on silicon studied by x-ray photoelectron spectroscopy
Edward Preisler, O. J. Marsh, Robin Beach et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 136 citations
Natural Sciences, Materials Engineering, Materials Science +17
Disorder produced in SiC by ion bombardment
R. R. Hart, H. L. Dunlap, O. J. Marsh · Radiation Effects · 1971 · 84 citations
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