Motosuke Miyoshi

Beam induced deposition of an ultraviolet transparent silicon oxide film by focused gallium ion beam

Masataka Ogasawara, Mitsuyo Kariya, Hiroko Nakamura et al. · Applied Physics Letters · 1996 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +17

Negative charging-up contrast formation of multilayered structures with a nonpenetrating electron beam in scanning-electron microscope

Motosuke Miyoshi, Katsumi Ura · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 21 citations

Natural Sciences, Materials Science, Physics +16

Electron beam inspection system based on the projection imaging electron microscope

Motosuke Miyoshi, Yuichiro Yamazaki, Ichirota Nagahama et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 21 citations

Engineering, Electrical Engineering, Instrumentation +14

Laboratory-size three-dimensional x-ray microscope with Wolter type I mirror optics and an electron-impact water window x-ray source

Shinji Ohsuka, Akira Ohba, Shinobu Onoda et al. · Review of Scientific Instruments · 2014 · 16 citations · Full text

Engineering, Biomedical Engineering, Physics +17

A precise and automatic very large scale integrated circuit pattern linewidth measurement method using a scanning electron microscope

Motosuke Miyoshi, Masaaki Kanoh, H. Yamaji et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 15 citations

Natural Sciences, Electrical Engineering, Materials Science +14