Concepedia

H. Yamaji

HY

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Publications

1

Citations

15

H-Index

1

Active since

1986

Affiliations

Toshiba (Japan)(Current)

H. Yamaji is an author at Toshiba (Japan) specializing in materials characterization, electron microscopy, and scanning electron microscope metrology.

Publications per year

1986–1986

1

Publications

1

A precise and automatic very large scale integrated circuit pattern linewidth measurement method using a scanning electron microscope

Motosuke Miyoshi, Masaaki Kanoh, H. Yamaji et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 15 citations

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