Concepedia

Author

Teruyoshi Yao

ASM International (Belgium)

Also Known As

Teruyoshi Yao, Teruyoshi Yao Teruyoshi Yao

9

Publications

44

Citations

3

H-Index

19

Concepts

All Affiliations

ASM International (Belgium)
TY

About

Teruyoshi Yao is an author at ASM International (Belgium) specializing in engineering, microelectronics, and vlsi design.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

2

2

31

2

Applied Physics

1

1

16

3

Computer Engineering

1

1

15

4

Electrical Engineering

1

1

15

5

Physics

1

1

16

Teruyoshi Yao

×

2

Publications

31

Citations

2

H-Index

YearCitations

Correction for local flare effects approximated with double Gaussian profile in ArF lithography

Morimi Osawa, Teruyoshi Yao, Hajime Aoyama,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

2003

16

Joint optimization of layout and litho for SRAM and logic towards the 20nm node using 193i

Peter De Bisschop, Bart Laenens, Kazuya Iwase,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2011

15

Page 1