Teruyoshi Yao is an author at ASM International (Belgium) specializing in engineering, microelectronics, and vlsi design.
Top concepts
EngineeringRadarDesignPhysicsVlsi DesignOphthalmologyApplied PhysicsInstrumentationOptoelectronicsInverse Problems
Publications per year
2003–2011
2
2
Correction for local flare effects approximated with double Gaussian profile in ArF lithography
Morimi Osawa, Teruyoshi Yao, Hajime Aoyama et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 16 citations
Local Flare Correction, Electron-beam Lithography, Engineering +16
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