Morimi Osawa - Concepedia

Author

Morimi Osawa

Also Known As

M. Osawa, Morimi Osawa

Publications

109

Citations

H-Index

Concepts

All Affiliations

Morimi Osawa is an author at Fujitsu (Japan) specializing in computational electromagnetics, engineering, and applied physics.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	71
2	Applied Physics	2	2	61
3	Natural Sciences	1	1	10
4	Electrical Engineering	1	1	45
5	Physics	1	1	16

Morimi Osawa

Publications

Citations

H-Index

Page 1

	Year	Citations
Proximity effect correction using pattern shape modification and area density map for electron-beam projection lithography Morimi Osawa, Kimitoshi Takahashi, Masami Sato, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Pattern DensitiesElectrical EngineeringEngineeringProximity Effect CorrectionElectron-beam Projection Lithography	2001	45
Correction for local flare effects approximated with double Gaussian profile in ArF lithography Morimi Osawa, Teruyoshi Yao, Hajime Aoyama, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Local Flare CorrectionElectron-beam LithographyEngineeringOptic DesignOptical Testing	2003	16
Proximity effect correction using pattern shape modification and area density map Kimitoshi Takahashi, Morimi Osawa, Masami Sato, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Geometric ModelingRadarDose ModulationEngineeringProximity Effect Correction	2000	10

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