Gregory A. Hebner

Frequency dependent plasma characteristics in a capacitively coupled 300 mm wafer plasma processing chamber

Gregory A. Hebner, Edward V. Barnat, Paul Miller et al. · Plasma Sources Science and Technology · 2006 · 90 citations

Electrical Engineering, Line-integrated Electron Density, Engineering +9

Spatial and frequency dependence of plasma currents in a 300 mm capacitively coupled plasma reactor

Paul Miller, Edward V. Barnat, Gregory A. Hebner et al. · Plasma Sources Science and Technology · 2006 · 66 citations

Electrical Engineering, Plasma Reactor, Engineering +14

Charged species dynamics in an inductively coupled Ar/SF6 plasma discharge

Shahid Rauf, Peter L. G. Ventzek, I. C. Abraham et al. · Journal of Applied Physics · 2002 · 45 citations

Engineering, Glow Discharge, Plasma Science +16

Self-consistent three-dimensional model of dust particle transport and formation of Coulomb crystals in plasma processing reactors

Vivek M. Vyas, Gregory A. Hebner, Mark J. Kushner · Journal of Applied Physics · 2002 · 40 citations

Engineering, Plasma Science, Particle Method +21

Direct Simulation Monte Carlo of Inductively Coupled Plasma and Comparison with Experiments

Justine E. Johannes, Timothy Bartel, Gregory A. Hebner et al. · Journal of The Electrochemical Society · 1997 · 23 citations

Engineering, Plasma Science, Plasma Physics +21