Gregory A. Hebner - Concepedia

Author

Gregory A. Hebner

Sandia National Laboratories

Also Known As

G. A. Hebner, GREGORY A. HEBNER, GREGORY HEBNER, Gregory A Hebner, Gregory A. Hebner, Gregory Hebner

Publications

350

Citations

H-Index

Concepts

All Affiliations

Sandia National Laboratories University of Illinois Urbana-Champaign Applied Materials (United States)

About

Gregory A. Hebner is an author at Sandia National Laboratories specializing in engineering, physics, and applied physics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	8	8	311
2	Applied Physics	6	6	276
3	Natural Sciences	4	4	98
4	Chemical Engineering	1	1	23
5	Chemistry	1	1	23

Gregory A. Hebner

Publications

311

Citations

H-Index

Page 1

	Year	Citations
Frequency dependent plasma characteristics in a capacitively coupled 300 mm wafer plasma processing chamber Gregory A. Hebner, Edward V. Barnat, Paul Miller, Plasma Sources Science and Technology Electrical EngineeringLine-integrated Electron DensityEngineeringArgon Metastable DensityApplied Physics	2006	90
Spatial and frequency dependence of plasma currents in a 300 mm capacitively coupled plasma reactor Paul Miller, Edward V. Barnat, Gregory A. Hebner, Plasma Sources Science and Technology Electrical EngineeringPlasma ReactorEngineeringRf FieldsPhysics	2006	66
Charged species dynamics in an inductively coupled Ar/SF6 plasma discharge Shahid Rauf, Peter L. G. Ventzek, I. C. Abraham, Journal of Applied Physics EngineeringGlow DischargePlasma SciencePlasma PhysicsSpace Plasma Physics	2002	45
Self-consistent three-dimensional model of dust particle transport and formation of Coulomb crystals in plasma processing reactors Vivek M. Vyas, Gregory A. Hebner, Mark J. Kushner Journal of Applied Physics EngineeringPlasma ScienceParticle MethodPlasma PhysicsPlasma Processing Reactors	2002	40
Direct Simulation Monte Carlo of Inductively Coupled Plasma and Comparison with Experiments Justine E. Johannes, Timothy Bartel, Gregory A. Hebner, Journal of The Electrochemical Society EngineeringPlasma SciencePlasma PhysicsChemistryPlasma Processing	1997	23
Predictions for gain in the fission-fragment-excited atomic xenon laser Jong W. Shon, Mark J. Kushner, Gregory A. Hebner, Journal of Applied Physics Reactor-excited Xenon LaserEngineeringNuclear PhysicsLaser ScienceLaser-plasma Interaction	1993	18
Optical self-absorption technique for qualitative measurement of excited-state densities in plasma reactors Paul Miller, Gregory A. Hebner, Robert Jarecki, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringPhysicsOptical PropertiesSpectroscopyNatural Sciences	1998	17
Phase and energy distribution of ions incident on electrodes in radio-frequency discharges Gregory A. Hebner, Mark J. Kushner Journal of Applied Physics Electrical EngineeringEngineeringEnergy DistributionSheath VoltageGlow Discharge	1987	12

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