Justine E. Johannes

Modeling the plasma chemistry of C2F6 and CHF3 etching of silicon dioxide, with comparisons to etch rate and diagnostic data

Pauline Ho, Justine E. Johannes, Richard J. Buss et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 125 citations

Natural Sciences, Materials Engineering, Materials Science +17

An introduction to nanotechnology policy: Opportunities and constraints for emerging and established economies

A. D. Romig, Arnold Barry Baker, Justine E. Johannes et al. · Technological Forecasting and Social Change · 2007 · 102 citations

Public Affairs, Economics, Public Policy +9

Direct Simulation Monte Carlo of Inductively Coupled Plasma and Comparison with Experiments

Justine E. Johannes, Timothy Bartel, Gregory A. Hebner et al. · Journal of The Electrochemical Society · 1997 · 23 citations

Natural Sciences, Chemistry, Physics +17

Gas‐Phase Reaction Study of Disilane Pyrolysis: Applications to Low Pressure Chemical Vapor Deposition

Justine E. Johannes, John G. Ekerdt · Journal of The Electrochemical Society · 1994 · 13 citations

Natural Sciences, Chemical Engineering, Chemistry +16