Oh Seong Kwon

Enhanced electrical properties of SrTiO3 thin films grown by atomic layer deposition at high temperature for dynamic random access memory applications

Sang Woon Lee, Oh Seong Kwon, Jeong Hwan Han et al. · Applied Physics Letters · 2008 · 120 citations

Non-volatile Memory, Engineering, Emerging Memory Technology +18

Growth Characteristics of Atomic Layer Deposited TiO[sub 2] Thin Films on Ru and Si Electrodes for Memory Capacitor Applications

Wan Don Kim, Gyu Weon Hwang, Oh Seong Kwon et al. · Journal of The Electrochemical Society · 2005 · 74 citations

Growth Characteristics, Incubation Period, Engineering +17

Chemically Conformal ALD of SrTiO[sub 3] Thin Films Using Conventional Metallorganic Precursors

Oh Seong Kwon, Seong Keun Kim, Moonju Cho et al. · Journal of The Electrochemical Society · 2005 · 71 citations

Conformal Ald, Engineering, Thin Film Process Technology +18

Atomic Layer Deposition and Electrical Properties of SrTiO[sub 3] Thin Films Grown Using Sr(C[sub 11]H[sub 19]O[sub 2])[sub 2], Ti(Oi-C[sub 3]H[sub 7])[sub 4], and H[sub 2]O

Oh Seong Kwon, Sang Woon Lee, Jeong Hwan Han et al. · Journal of The Electrochemical Society · 2007 · 54 citations

Materials Science, Materials Engineering, Chemical Engineering +15

Influences of a Crystalline Seed Layer during Atomic Layer Deposition of SrTiO[sub 3] Thin Films Using Ti(O-iPr)[sub 2](thd)[sub 2], Sr(thd)[sub 2], and H[sub 2]O

Sang Woon Lee, Jeong Hwan Han, Oh Seong Kwon et al. · Journal of The Electrochemical Society · 2008 · 38 citations · Full text

Engineering, Crystal Growth Technology, Chemical Deposition +16