Anu Kärkkäinen - Concepedia

Author

Anu Kärkkäinen

Also Known As

Anu Karkkainen, Anu Kärkkäinen, Karkkainen, Anu

Publications

170

Citations

H-Index

Concepts

All Affiliations

Anu Kärkkäinen is an author at VTT Technical Research Centre of Finland specializing in engineering, instrumentation, and microfabrication.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	119
2	Electrical Engineering	2	2	32
3	Mechanical Engineering	2	2	108
4	Education	1	1	87
5	Applied Physics	1	1	21

Anu Kärkkäinen

Publications

135

Citations

H-Index

Page 1

	Year	Citations
A 3D micromechanical compass Jukka Kyynäräinen, Jaakko Saarilahti, H. Kattelus, Sensors and Actuators A Physical Geometric ModelingRobot KinematicsEngineeringGeometryMechanical Engineering	2007	87
Stability of Electrostatic Actuation of MEMS Anu Kärkkäinen, A. Oja, Jukka Kyynäräinen, Physica Scripta Electrical EngineeringMems SensorsElectrostatic ActuationEngineeringMicrofabrication	2004	21
Development of ScAlN PMUTs for Medical Applications Cyril Baby Karuthedath, Abhilash Thanniyil Sebastian, P. Helistö, Journal of Microelectromechanical Systems	2023	16
Stable SOI micromachined electrostatic AC voltage reference Anu Kärkkäinen, Panu Pekko, James Dekker, Microsystem Technologies Electrical EngineeringEngineeringMicromachinesMicrofabricationStable Soi	2005	11

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