Paulina A. Rincon-Delgadillo

Molecular pathways for defect annihilation in directed self-assembly

Su‐Mi Hur, Vikram Thapar, Abelardo Ramírez-Hernández et al. · Proceedings of the National Academy of Sciences · 2015 · 107 citations · Full text

Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow

Hari Pathangi, Boon Teik Chan, Hareen Bayana et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 37 citations

Materials Science, Materials Engineering, Defect Tolerance +14

Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy

Hyo Seon Suh, Xuanxuan Chen, Paulina A. Rincon-Delgadillo et al. · Journal of Applied Crystallography · 2016 · 35 citations · Full text

Atomic Force Microscopy, Engineering, Electron-beam Lithography +22

Ionic Liquids as Additives to Polystyrene-<i>Block</i>-Poly(Methyl Methacrylate) Enabling Directed Self-Assembly of Patterns with Sub-10 nm Features

Xuanxuan Chen, Chun Zhou, Shuangjun Chen et al. · ACS Applied Materials & Interfaces · 2018 · 34 citations · Full text

Defect mitigation and root cause studies in IMEC's 14nm half-pitch chemo-epitaxy DSA flow

Hari Pathangi, Boon Teik Chan, Hareen Bayana et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 13 citations

Engineering, Mechanical Engineering, Root Cause Studies +17