N.Q. Khánh

Catalyst traces and other impurities in chemically purified carbon nanotubes grown by CVD

László Péter Biró, N.Q. Khánh, Z. Vértesy et al. · Materials Science and Engineering C · 2002 · 49 citations

Materials Science, Chemical Engineering, Catalytic Application +9

Porous silicon host matrix for deposition by atomic layer epitaxy

Mikko Utriainen, Sari Lehto, Lauri Niinistö et al. · Thin Solid Films · 1997 · 32 citations

Materials Science, Engineering, Atomic Layer Epitaxy +7

Ellipsometric characterization of damage profiles using an advanced optical model

P. Petrík, O. Polgár, M. Fried et al. · Journal of Applied Physics · 2003 · 31 citations

Optical Materials, Impact (Mechanics), Engineering +25

Dose-dependence of ion implantation-caused damage in silicon measured by ellipsometry and backscattering spectrometry

M. Fried, P. Petrík, T. Lohner et al. · Thin Solid Films · 2004 · 18 citations

Ion Implantation, Ion Implantation-caused Damage, Backscattering Spectrometry +8

Comparative study of ion implantation caused damage depth profiles in polycrystalline and single crystalline silicon studied by spectroscopic ellipsometry and Rutherford backscattering spectrometry

P. Petrík, T. Lohner, M. Fried et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 16 citations

Materials Science, Ion Implantation, Engineering +7