Ichiro Kanomata

Microwave Plasma Etching

Keizô Suzuki, Sadayuki Okudaira, N. Sakudo et al. · Japanese Journal of Applied Physics · 1977 · 235 citations

Electrical Engineering, Al Mask, Engineering +11

Microwave ion source

N. Sakudo, K. Tokiguchi, H. Koike et al. · Review of Scientific Instruments · 1977 · 103 citations

Electrical Engineering, Engineering, High-current Ion Beams +11

Determination of impurities in gases by atmospheric pressure ionization mass spectrometry

Hideki Kambara, Ichiro Kanomata · Analytical Chemistry · 1977 · 65 citations

Environmental Chemistry, Air Sampling, Engineering +14

Microwave ion source for high-current implanter

N. Sakudo, K. Tokiguchi, H. Koike et al. · Review of Scientific Instruments · 1978 · 56 citations

Electrical Engineering, Energy Harvesting, Engineering +9

Identification of clusters produced in an atmospheric pressure ionization process by a collisional dissociation method

Hideki Kambara, Yasuhiro Mitsui, Ichiro Kanomata · Analytical Chemistry · 1979 · 55 citations

Engineering, Altmetric Attention Score, Computational Chemistry +19