Concepedia

Katsuro Sugawara

KS

11

Publications

229

Citations

10

H-Index

1969

Active since

Affiliations

Hitachi (Japan)(Current)

Katsuro Sugawara is an author at Hitachi (Japan) specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsThin FilmsSurface ScienceMaterials EngineeringMicroelectronicsChemistryCrystalline DefectsPhysics

Publications per year

1969–1994

11

Publications

11

Misfit Dislocations in Bicrystals of Epitaxially Grown Silicon on Boron-Doped Silicon Substrates

Yoshimitsu Sugita, M. Tamura, Katsuro Sugawara · Journal of Applied Physics · 1969 · 53 citations

Materials Science, Materials Engineering, Semiconductors +15

Silicon Epitaxial Growth by Rotating Disk Method

Katsuro Sugawara · Journal of The Electrochemical Society · 1972 · 49 citations

Materials Engineering, Epitaxial Growth, Engineering +10

In Situ Monitoring of Film Deposition Using He-Ne Laser System

Katsuro Sugawara, Takeo Yoshimi, Hiroaki Okuyama et al. · Journal of The Electrochemical Society · 1974 · 22 citations

Materials Science, Laser Optics, Advanced Laser Processing +11

The Influence of Plasma Silicon Nitride Passivation Film Quality on Aluminum Void Formation

Kenji Tokunaga, Katsuro Sugawara · Journal of The Electrochemical Society · 1991 · 19 citations

Aluminium Nitride, Engineering, Thin Film Process Technology +18

Misfit Dislocations in the Bicrystal System of Silicon-Boron-Doped Silicon

Yoshimitsu Sugita, M. Tamura, Katsuro Sugawara · Journal of Vacuum Science and Technology · 1969 · 14 citations · Full text

Materials Engineering, Materials Science, Epitaxial Growth +15

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