Concepedia

Kenji Tokunaga

KT

1

Publications

19

Citations

1

H-Index

1991

Active since

Affiliations

Hitachi (Japan)(Current)

Kenji Tokunaga is an author at Hitachi (Japan) specializing in thin films, microelectronics, and solid mechanics.

Top concepts

Publications per year

1991–1991

1

Publications

1

The Influence of Plasma Silicon Nitride Passivation Film Quality on Aluminum Void Formation

Kenji Tokunaga, Katsuro Sugawara · Journal of The Electrochemical Society · 1991 · 19 citations

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