Concepedia

Takeo Yoshimi

TY

7

Publications

110

Citations

7

H-Index

1974

Active since

Affiliations

Hitachi (Japan)(Current)

Takeo Yoshimi is an author at Hitachi (Japan) specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringApplied PhysicsMaterial ScienceThin FilmsLaser OpticsInstrumentationSurface ScienceOptical MaterialsLaser ApplicationsHydrogen

Publications per year

1974–1998

7

Publications

7

In Situ Monitoring of Film Deposition Using He-Ne Laser System

Katsuro Sugawara, Takeo Yoshimi, Hiroaki Okuyama et al. · Journal of The Electrochemical Society · 1974 · 22 citations

Materials Science, Laser Optics, Advanced Laser Processing +11

Analysis of Hydrogen Content in Plasma Silicon Nitride Film

Takeo Yoshimi, Hideo Sakai, Keizo Tanaka · Journal of The Electrochemical Society · 1980 · 21 citations

Engineering, Applied Physics, Hydrogen +3

Plasma‐Activated Deposition and Properties of Phosphosilicate Glass Film

Akira Takamatsu, Miyoko Shibata, Hideo Sakai et al. · Journal of The Electrochemical Society · 1984 · 20 citations

Materials Science, Glass-ceramic, Optical Materials +8

Deposition Rate and Phosphorus Concentration of Phosphosilicate Glass Films in Relation to PH 3 / SiH4 + PH 3 Mole Fraction

Miyoko Shibata, Takeo Yoshimi, Katsuro Sugawara · Journal of The Electrochemical Society · 1975 · 13 citations

Materials Science, Glass-ceramic, Chemical Engineering +10

Methods to Improve the Surface Planarity of Locally Oxidized Silicon Devices

Hideo Sakai, Takeo Yoshimi, Katsuro Sugawara · Journal of The Electrochemical Society · 1977 · 12 citations

Materials Science, Electrical Engineering, Wafer Scale Processing +7

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