Concepedia

Miyoko Shibata

MS

3

Publications

47

Citations

3

H-Index

1966

Active since

Affiliations

Hitachi (Japan)(Current)

Miyoko Shibata is an author at Hitachi (Japan) specializing in engineering, materials science, and optical properties.

Top concepts

Publications per year

1966–1984

3

Publications

3

Plasma‐Activated Deposition and Properties of Phosphosilicate Glass Film

Akira Takamatsu, Miyoko Shibata, Hideo Sakai et al. · Journal of The Electrochemical Society · 1984 · 20 citations

, , +8

Reststrahl Reflection Characteristics of Amorphous Silica

Kenzo Sato, Miyoko Shibata · Journal of the Physical Society of Japan · 1966 · 14 citations

, , +17

Deposition Rate and Phosphorus Concentration of Phosphosilicate Glass Films in Relation to  O 2 / SiH4 +  PH 3 Mole Fraction

Miyoko Shibata, Katsuro Sugawara · Journal of The Electrochemical Society · 1975 · 13 citations

, , +11

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