Concepedia

Miyoko Shibata

MS

1

Publications

13

Citations

1

H-Index

1975

Active since

Affiliations

Hitachi (Japan)(Current)

Miyoko Shibata is an author at Hitachi (Japan) specializing in engineering, chemistry, and surface science.

Top concepts

ChemistryEngineeringSurface ScienceMaterial ScienceChemical Engineering

Publications per year

1975–1975

1

Publications

1

Deposition Rate and Phosphorus Concentration of Phosphosilicate Glass Films in Relation to PH 3 / SiH4 + PH 3 Mole Fraction

Miyoko Shibata, Takeo Yoshimi, Katsuro Sugawara · Journal of The Electrochemical Society · 1975 · 13 citations

Materials Science, Glass-ceramic, Chemical Engineering +10

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