Klaus Hasche

Metrological large range scanning probe microscope

Gaoliang Dai, Frank Pohlenz, Hans‐Ulrich Danzebrink et al. · Review of Scientific Instruments · 2004 · 151 citations

Engineering, Mechatronics Engineering, Instrumentation +16

Improving the performance of interferometers in metrological scanning probe microscopes

Gaoliang Dai, Frank Pohlenz, Hans‐Ulrich Danzebrink et al. · Measurement Science and Technology · 2004 · 49 citations

Engineering, Mechatronics Engineering, Instrumentation +16

Measurement of micro-roughness using a metrological large range scanning force microscope

Gaoliang Dai, Lena Jung, Frank Pohlenz et al. · Measurement Science and Technology · 2004 · 25 citations

Engineering, Materials Engineering, Materials Science +17

Metrological characterization of nanometer film thickness standards for XRR and ellipsometry applications

Klaus Hasche, Peter Thomsen-Schmidt, Michael Krumrey et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +13