Concepedia

Author

Takeharu Motokawa

Nissin Kogyo (Japan)

Also Known As

T Motokawa, T. Motokawa, Takeharu MOTOKAWA, Takeharu Motokawa, Takeharu Motokawa Takeharu Motokawa

20

Publications

104

Citations

7

H-Index

29

Concepts

All Affiliations

Nissin Kogyo (Japan)Toshiba (Japan)Kwansei Gakuin UniversityThe University of OsakaKubota (Japan)
TM

About

Takeharu Motokawa is an author at Nissin Kogyo (Japan) specializing in engineering, applied physics, and materials science.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

6

6

84

2

Applied Physics

5

5

65

3

Materials Science

3

3

40

4

Computer Engineering

2

2

30

5

Electrical Engineering

2

2

23

Takeharu Motokawa

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6

Publications

84

Citations

6

H-Index

YearCitations

High performance mask fabrication process for the next-generation mask production

Keisuke Yagawa, Kunihiro Ugajin, Machiko Suenaga,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2014

19

Extremely flat interfaces in GaAs/AlGaAs quantum wells with high Al content (0.7) grown on GaAs (411)A substrates by molecular beam epitaxy

S. Shimomura, Shinjiroh Kaneko, Takeharu Motokawa,

Journal of Crystal Growth

1995

18

Extremely Flat Interfaces in In<sub>x</sub>Ga<sub> 1-x</sub>As/Al<sub> 0.3</sub>Ga<sub> 0.7</sub>As Quantum Wells Grown on (411)A GaAs Substrates by Molecular Beam Epitaxy

Tatsuya Saeki, Takeharu Motokawa, Takahiro Kitada,

Japanese Journal of Applied Physics

1997

13

Electrical properties of Si-doped GaAs layers grown on (411)A GaAs substrates by molecular beam epitaxy

K. Shinohara, Takeharu Motokawa, Kenji Kasahara,

Semiconductor Science and Technology

1996

12

Patterning of EUVL binary etched multilayer mask

Kosuke Takai, Takeharu Motokawa, Koji Murano,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2013

11

Half pitch 14 nm direct pattering with Nanoimprint lithography

T. Nakasugi, T. Kono, Kazuya Fukuhara,

2018

11

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