Concepedia

Takeharu Motokawa

TM

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Publications

6

Citations

84

H-Index

6

Active since

1995

Affiliations

Nissin Kogyo (Japan)(Current)

Toshiba (Japan)

Kwansei Gakuin University

The University of Osaka

Kubota (Japan)

Takeharu Motokawa is an author at Nissin Kogyo (Japan) specializing in engineering, applied physics, and materials science.

Top concepts

Publications per year

1995–2018

6

Publications

6

High performance mask fabrication process for the next-generation mask production

Keisuke Yagawa, Kunihiro Ugajin, Machiko Suenaga et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 19 citations

, , +11

Extremely flat interfaces in GaAs/AlGaAs quantum wells with high Al content (0.7) grown on GaAs (411)A substrates by molecular beam epitaxy

S. Shimomura, Shinjiroh Kaneko, Takeharu Motokawa et al. · Journal of Crystal Growth · 1995 · 18 citations

, , +6

Extremely Flat Interfaces in In<sub>x</sub>Ga<sub> 1-x</sub>As/Al<sub> 0.3</sub>Ga<sub> 0.7</sub>As Quantum Wells Grown on (411)A GaAs Substrates by Molecular Beam Epitaxy

Tatsuya Saeki, Takeharu Motokawa, Takahiro Kitada et al. · Japanese Journal of Applied Physics · 1997 · 13 citations

, , +17

Electrical properties of Si-doped GaAs layers grown on (411)A GaAs substrates by molecular beam epitaxy

K. Shinohara, Takeharu Motokawa, Kenji Kasahara et al. · Semiconductor Science and Technology · 1996 · 12 citations

, , +16

Patterning of EUVL binary etched multilayer mask

Kosuke Takai, Takeharu Motokawa, Koji Murano et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 11 citations

, , +16

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