Statistics
Publications
3
Citations
36
H-Index
3
Active since
1982
Affiliations
Kazuya Fukuhara is an author at Toshiba (Japan) specializing in engineering, fluid mechanics, and transient flow analysis.
Publications per year
1982–2018
3
3
Overlay improvement in nanoimprint lithography for 1×-nm patterning
Kazuya Fukuhara, Masato Suzuki, Masaki Mitsuyasu et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2016 · 13 citations
Engineering, Electrical Engineering, Manufacturing Engineering +15
Half pitch 14 nm direct pattering with Nanoimprint lithography
T. Nakasugi, T. Kono, Kazuya Fukuhara et al. · 2018 · 12 citations
Engineering, Manufacturing Engineering, Materials Science +17
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