T. Ichikawa

3.2 Megapixel 3D-Stacked Charge Focusing SPAD for Low-Light Imaging and Depth Sensing

Kazuhiro Morimoto, J. Iwata, M. Shinohara et al. · 2021 IEEE International Electron Devices Meeting (IEDM) · 2021 · 100 citations

Photonic Sensor, High Resolution, Engineering +21

Formation of device-grade epitaxial silicon films at extremely low temperatures by low-energy bias sputtering

T. Ohmi, T. Ichikawa, Hiroshi Iwabuchi et al. · Journal of Applied Physics · 1989 · 99 citations

Crystal Structure, Engineering, Integrated Circuits +19

<i>I</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> substrate-surface cleaning for very low temperature silicon epitaxy by low-kinetic-energy particle bombardment

T. Ohmi, T. Ichikawa, T. Shibata et al. · Applied Physics Letters · 1988 · 75 citations

Semiconductors, Materials Science, Surface Technology +14

Low-temperature silicon epitaxy by low-energy bias sputtering

T. Ohmi, Kiyohiko Matsudo, T. Shibata et al. · Applied Physics Letters · 1988 · 52 citations

Engineering, Integrated Circuits, Thin Film Process Technology +18

Manipulation of nucleation sites and periods over amorphous substrates

T. Yonehara, Y. Nishigaki, H. Mizutani et al. · Applied Physics Letters · 1988 · 31 citations

Materials Science, Material Analysis, Engineering +12