Concepedia

Kiyohiko Matsudo

KM

3

Publications

138

Citations

3

H-Index

1988

Active since

Affiliations

Tohoku University(Current)

Kiyohiko Matsudo is an author at Tohoku University specializing in engineering, applied physics, and thin films.

Top concepts

Publications per year

1988–1988

3

Publications

3

<i>I</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> substrate-surface cleaning for very low temperature silicon epitaxy by low-kinetic-energy particle bombardment

T. Ohmi, T. Ichikawa, T. Shibata et al. · Applied Physics Letters · 1988 · 75 citations

, , +14

Low-temperature silicon epitaxy by low-energy bias sputtering

T. Ohmi, Kiyohiko Matsudo, T. Shibata et al. · Applied Physics Letters · 1988 · 52 citations

, , +18

Very-Low-Temperature Epitaxial Silicon Growth By Low-Kinetic-Energy Particle Bombardment

Tadahiro Ohmi, Kiyohiko Matsudo, Tadashi Shibata et al. · Japanese Journal of Applied Physics · 1988 · 11 citations

, , +15

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