20
Publications
787
Citations
16
H-Index
1988
Active since
Hiroshi Iwabuchi is an author at Tohoku University specializing in engineering, thin films, and materials science.
Top concepts
Thin FilmsEngineeringApplied PhysicsMaterial ScienceSurface ScienceIntegrated CircuitsSemiconductorsMedicineMicroelectronicsElectronic Devices
Publications per year
1988–2020
20
20
T. Ohmi, T. Ichikawa, T. Shibata et al. · Applied Physics Letters · 1988 · 75 citations
Low-temperature silicon epitaxy by low-energy bias sputtering
T. Ohmi, Kiyohiko Matsudo, T. Shibata et al. · Applied Physics Letters · 1988 · 52 citations
Engineering, Integrated Circuits, Thin Film Process Technology +18
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